Upscaling high-quality CVD graphene devices to 100 micron-scale and beyond

Abstract

We describe a method for transferring ultra large-scale chemical vapor deposition-grown graphene sheets. These samples can be fabricated as large as several cm2 and are characterized by magneto-transport measurements on SiO2 substrates. The process we have developed is highly effective and limits damage to the graphene all the way through metal liftoff, as shown in carrier mobility measurements and the observation of the quantum Hall effect. The charge-neutral point is shown to move drastically to near-zero gate voltage after a 2-step post-fabrication annealing process, which also allows for greatly diminished hysteresis.

Document Details

Document Type
Pub Defense Publication
Publication Date
Mar 13, 2017
Source ID
10.1063/1.4978643

Entities

People

  • Alba Centeno
  • Amaia Pesquera
  • Amaia Zurutuza
  • August Dorn
  • Jonas Sichau
  • Robert H Blick
  • T. J. Lyon

Organizations

  • Air Force Office of Scientific Research
  • German Research Foundation
  • University of Hamburg

Tags

Fields of Study

  • Physics

Readers

  • Integrated Circuit Design and Technology.
  • Semiconductor Device Technology
  • Superconducting Magnet Technology

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene
  • Quantum Computing