Freestanding nanostructures via reactive ion beam angled etching
Abstract
Freestanding nanostructures play an important role in optical and mechanical devices for classical and quantum applications. Here, we use reactive ion beam angled etching to fabricate optical resonators in bulk polycrystalline and single crystal diamond. Reported quality factors are approximately 30 000 and 286 000, respectively. The devices show uniformity across 25 mm samples, a significant improvement over comparable techniques yielding freestanding nanostructures.
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- May 01, 2017
- Source ID
- 10.1063/1.4982603
Entities
People
- Ammar B. Kouki
- Haig A. Atikian
- Marko Loncar
- Michael J. Burek
- Normand Gravel
- Pawel Latawiec
- Srujan Meesala
- Young-ik Sohn
Organizations
- Air Force Office of Scientific Research
- Defense Advanced Research Projects Agency
- Harvard University
- National Science Foundation
- École de technologie supérieure