Surface diffusion measurements of In on InGaAs enabled by droplet epitaxy

Abstract

Surface diffusion is a critical parameter for non-equilibrium growth techniques such as molecular beam epitaxy. However, very little is known about diffusion rates of individual cations in a mixed cation material. Using droplet epitaxy as the growth technique, we isolate the diffusivity prefactor (D0) and activation energy (EA) of indium on the surface of In0.53Ga0.47As/InP(100). We report two regimes of indium diffusivity under As2-rich conditions: above and below the droplet deposition temperature of 300 °C, corresponding to a change in surface reconstruction. We also discuss methods of extracting the indium diffusion parameters on metal-rich surfaces using droplet epitaxy and nucleation theory. The obtained diffusion parameters are compared to previous work in the literature and could be employed to optimize growth conditions for non-equilibrium crystal growth.

Document Details

Document Type
Pub Defense Publication
Publication Date
May 16, 2017
Source ID
10.1063/1.4983257

Entities

People

  • Margaret A. Stevens
  • Michael K. Yakes
  • Sergey I Maximenko
  • Stephanie Tomasulo
  • Thomas E. Vandervelde

Organizations

  • Office of Naval Research
  • Tufts University
  • United States Naval Research Laboratory

Tags

Fields of Study

  • Materials science

Readers

  • Materials Science and Engineering.
  • Semiconductor Device Technology
  • Thin Film Deposition Science.