Integration of ferroelectric BaTiO3 with Ge: The role of a SrTiO3 buffer layer investigated using aberration-corrected STEM

Abstract

The integration of semiconductors with ferroelectrics having a controlled polarization direction is an ongoing and challenging topic of research. In this work, BaTiO3 (BTO)/SrTiO3 (STO) heterostructures were grown by molecular beam epitaxy either directly with STO substrates or by using 2-nm-thick STO buffer layers on Ge(001) substrates. Sharp, chemically abrupt interfaces and c-axis-oriented BTO films for both types of heterostructures were observed using aberration-corrected scanning transmission electron microscopy and elemental mapping. Anti-phase boundaries as well as ⟨100⟩ misfit dislocations were present in the BTO/STO samples, with the offsets of the dislocation cores varying by distances between 1 and 5 nm away from the BTO/STO interface. Conversely, misfit dislocations were not observed in the BTO/STO/Ge structure although vertical anti-phase boundaries were still common. Overall, the results emphasize the benefits of identifying a suitable buffer layer to ensure the growth of a high quality material having the desired out-of-plane ferroelectric polarization.

Document Details

Document Type
Pub Defense Publication
Publication Date
Jun 19, 2017
Source ID
10.1063/1.4986186

Entities

People

  • Alexander A Demkov
  • David J Smith
  • Hsinwei Wu
  • John G Ekerdt
  • Martha R. Mccartney
  • Patrick Ponath
  • Sirong Lu
  • Toshihiro Aoki

Organizations

  • Air Force Office of Scientific Research
  • Arizona State University
  • University of Texas at Austin

Tags

Fields of Study

  • Physics

Readers

  • Materials Science and Engineering.
  • Nanoscale Plasmonic Nanotechnology
  • Semiconductor Device Technology

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene