Mutual 3:1 subharmonic synchronization in a micromachined silicon disk resonator

Abstract

We demonstrate synchronization between two intrinsically coupled oscillators that are created from two distinct vibration modes of a single micromachined disk resonator. The modes have a 3:1 subharmonic frequency relationship and cubic, non-dissipative electromechanical coupling between the modes enables their two frequencies to synchronize. Our experimental implementation allows the frequency of the lower frequency oscillator to be independently controlled from that of the higher frequency oscillator, enabling study of the synchronization dynamics. We find close quantitative agreement between the experimental behavior and an analytical coupled-oscillator model as a function of the energy in the two oscillators. We demonstrate that the synchronization range increases when the lower frequency oscillator is strongly driven and when the higher frequency oscillator is weakly driven. This result suggests that synchronization can be applied to the frequency-selective detection of weak signals and other mechanical signal processing functions.

Document Details

Document Type
Pub Defense Publication
Publication Date
Oct 30, 2017
Source ID
10.1063/1.4997195

Entities

People

  • Andrea Guerrieri
  • Attilio Frangi
  • David A. Horsley
  • Martial Defoort
  • Parsa Taheri-Tehrani

Tags

Fields of Study

  • Physics

Readers

  • Electronics Engineering
  • Materials Science and Engineering.
  • Radio communications and signal processing.

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems