Effect of finger geometries on strain response of interdigitated capacitor based soft strain sensors

Abstract

The finger geometry of embedded elastomeric comb capacitors significantly affects the electromechanical response of interdigitated capacitor (IDC) based soft sensors. When strain is applied to these IDC based soft sensors, the embedded soft combs are deformed, changing the sensor's capacitance to detect a variety of different mechanical loads. To better understand the effect of design parameters on sensor sensitivity, a comprehensive closed-form analytical model using geometric stretch and a parallel plate capacitance model in combination with a coplanar waveguide model to predict the strain response as a function of finger geometry and load orientation were developed. To validate this model, we compare the predicted response with computational and experimental methods using sensors with a combination of two different finger thicknesses and widths in a 4 mm2 area. Strong agreement was shown in all three results from the analytical model, the finite element analysis simulations, and the experiments validating that the sensitivity of IDC soft strain sensors can be tuned by finger geometry.

Document Details

Document Type
Pub Defense Publication
Publication Date
Jan 22, 2018
Source ID
10.1063/1.4998440

Entities

People

  • Hee-Sup Shin
  • Sarah Bergbreiter

Organizations

  • Air Force Office of Scientific Research
  • University of Maryland

Tags

Readers

  • Integrated Circuit Design and Technology.
  • Oncology and Biomarker-Based Cancer Detection.
  • Structural Dynamics.

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems