Nitride surface chemistry influence on band offsets at epitaxial oxide/GaN interfaces

Abstract

GaN surface and near-surface chemistry influence on band offsets of oxide overlayers is demonstrated through X-ray photoelectron spectroscopy measurements using epitaxial (111)-oriented MgO films on (0001)-oriented Ga-polar GaN as a case study. For identical cleaning and MgO growth conditions, GaN subsurface oxygen impurities influence the GaN bare surface band bending and the ultimate band offset to MgO heterolayers. As the GaN surface oxygen concentration increases from an atomic concentration of 0.9% to 3.4%, the valence band offset to MgO decreases from 1.68 eV to 1.29 eV, respectively. This study highlights the sensitivity of the oxide/nitride interface electronic structure to GaN epilayer preparation and growth conditions.

Document Details

Document Type
Pub Defense Publication
Publication Date
Feb 26, 2018
Source ID
10.1063/1.5013605

Entities

People

  • Andrew A. Allerman
  • Barney L. Doyle
  • Christina M. Rost
  • Christopher T. Shelton
  • Elizabeth A. Paisley
  • James A. Ohlhausen
  • Jon Ihlefeld
  • Jon-Paul Maria
  • Michael T. Brumbach
  • Stanley Atcitty
  • Zlatko Sitar

Organizations

  • Army Research Office
  • National Science Foundation
  • North Carolina State University
  • Sandia National Laboratories
  • University of Virginia

Tags

Fields of Study

  • Materials science

Readers

  • Semiconductor Device Technology
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene