Dynamic metasurface lens based on MEMS technology
Abstract
In the recent years, metasurfaces, being flat and lightweight, have been designed to replace bulky optical components with various functions. We demonstrate a monolithic Micro-Electro-Mechanical System (MEMS) integrated with a metasurface-based flat lens that focuses light in the mid-infrared spectrum. A two-dimensional scanning MEMS platform controls the angle of the lens along two orthogonal axes by ±9°, thus enabling dynamic beam steering. The device could be used to compensate for off-axis incident light and thus correct for aberrations such as coma. We show that for low angular displacements, the integrated lens-on-MEMS system does not affect the mechanical performance of the MEMS actuators and preserves the focused beam profile as well as the measured full width at half maximum. We envision a new class of flat optical devices with active control provided by the combination of metasurfaces and MEMS for a wide range of applications, such as miniaturized MEMS-based microscope systems, LIDAR scanners, and projection systems.
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Feb 01, 2018
- Source ID
- 10.1063/1.5018865
Entities
People
- Daniel Lopez
- Federico Capasso
- Il Woong Jung
- Mariano Troccoli
- Shuyan Zhang
- Tapashree Roy
Organizations
- Agency for Science, Technology and Research
- Air Force Office of Scientific Research
- Argonne National Laboratory
- Harvard University
- National Science Foundation
- United States Department of Energy