Effective quality factor tuning mechanisms in micromechanical resonators
Abstract
Quality factor (Q) is an important property of micro- and nano-electromechanical (MEM/NEM) resonators that underlie timing references, frequency sources, atomic force microscopes, gyroscopes, and mass sensors. Various methods have been utilized to tune the effective quality factor of MEM/NEM resonators, including external proportional feedback control, optical pumping, mechanical pumping, thermal-piezoresistive pumping, and parametric pumping. This work reviews these mechanisms and compares the effective Q tuning using a position-proportional and a velocity-proportional force expression. We further clarify the relationship between the mechanical Q, the effective Q, and the thermomechanical noise of a resonator. We finally show that parametric pumping and thermal-piezoresistive pumping enhance the effective Q of a micromechanical resonator by experimentally studying the thermomechanical noise spectrum of a device subjected to both techniques.
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Dec 01, 2018
- Source ID
- 10.1063/1.5027850
Entities
People
- Azadeh Ansari
- David B. Heinz
- Dongsuk D. Shin
- Ian B. Flader
- James M. L. Miller
- Luis Guillermo Villanueva
- Thomas W. Kenny
- Yunhan Chen
Organizations
- Defense Advanced Research Projects Agency
- Georgia Tech
- National Science Foundation
- Stanford University
- Swiss Federal Institute of Technology in Lausanne