Enhanced piezoelectricity of thin film hafnia-zirconia (HZO) by inorganic flexible substrates
Abstract
Hf0.5Zr0.5O2 (HZO) films are grown on rigid glass and flexible polyimide substrates using non-rapid thermal annealing. Films are comparatively investigated using macroscopic and local probe-based approaches to characterize their ferroelectric and piezoelectric properties. The polarization-electric field (P-E) measurements reveal that the ferroelectric characteristics of these thin films agree with the observed switchable piezoresponse hysteresis loops as well as electrically written, oppositely oriented domains. Moreover, the HZO thin films grown on flexible polyimide substrates display significantly enhanced piezoelectric response in comparison to the films grown on rigid substrates. This effect is likely due to improved domain wall motion caused by the mechanical release of the film-substrate couple. These findings suggest that inherently lead-free HZO thin films on flexible substrates are potential candidate materials for improved piezoelectric applications in wearable devices.
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Jul 09, 2018
- Source ID
- 10.1063/1.5031134
Entities
People
- Franky So
- Hanan Alexandra Hsain
- Hyeonggeun Yu
- Jacob L. Jones
- Jan Seidel
- Pankaj Sharma
Organizations
- Army Research Office
- Australian Research Council
- National Science Foundation
- North Carolina State University
- University of New South Wales