Si content variation and influence of deposition atmosphere in homoepitaxial Si-doped β-Ga2O3 films by pulsed laser deposition

Document Details

Document Type
Pub Defense Publication
Publication Date
Oct 01, 2018
Source ID
10.1063/1.5047214

Entities

People

  • Andrew J. Green
  • Antonio Crespo
  • Cynthia T. Bowers
  • D. C. Look
  • Darren B. Thomson
  • Gregg H. Jessen
  • Jeff L. Brown
  • K. Mahalingam
  • Kelson D. Chabak
  • Kevin Leedy
  • Vladimir Vasilyev

Organizations

  • Air Force Office of Scientific Research
  • Air Force Research Laboratory
  • Wright State University
  • Wyle Laboratories

Tags

Technology Areas

  • Directed Energy
  • Directed Energy - Pulsed-Laser Deposition