Deep level defects in β-Ga2O3 pulsed laser deposited thin films and Czochralski-grown bulk single crystals by thermally stimulated techniques

Abstract

Thermally stimulated techniques—thermally stimulated current (TSC) spectroscopy and thermally stimulated depolarization current (TSDC) spectroscopy—were used to comparatively study the electrical properties and deep level defects in β-Ga2O3 pulsed laser deposited thin films and Czochralski-grown bulk crystals. It was found that the samples are highly resistive and each sample may have different dark current activation energy. Deep level defects revealed by the thermally stimulated techniques vary from sample to sample. In addition to the common traps E1 (∼0.56 eV), E2 (∼0.84 eV), and E3 (∼0.99 eV), reported in the literature and revealed by DLTS studies of Ga2O3 bulk crystals, that were also found in our samples by the thermally stimulated techniques, a trap at ∼110 meV and several other traps are revealed specifically by TSDC between 105 and 225 K.

Document Details

Document Type
Pub Defense Publication
Publication Date
Mar 14, 2019
Source ID
10.1063/1.5049820

Entities

People

  • Buguo Wang
  • D. C. Look
  • Kevin Leedy

Organizations

  • Air Force Office of Scientific Research
  • Air Force Research Laboratory
  • Division of Materials Research
  • Wright State University

Tags

Fields of Study

  • Materials science

Readers

  • Materials Science and Engineering.
  • Semiconductor Device Technology

Technology Areas

  • Directed Energy
  • Directed Energy - Lasers
  • Directed Energy - Pulsed-Laser Deposition