The Velociprobe: An ultrafast hard X-ray nanoprobe for high-resolution ptychographic imaging
Abstract
Motivated by the advanced photon source upgrade, a new hard X-ray microscope called “Velociprobe” has been recently designed and built for fast ptychographic imaging with high spatial resolution. We are addressing the challenges of high-resolution and fast scanning with novel hardware designs, advanced motion controls, and new data acquisition strategies, including the use of high-bandwidth interferometric measurements. The use of granite, air-bearing-supported stages provides the necessary long travel ranges for coarse motion to accommodate real samples and variable energy operation while remaining highly stable during fine scanning. Scanning the low-mass zone plate enables high-speed and high-precision motion of the probe over the sample. With an advanced control algorithm implemented in a closed-loop feedback system, the setup achieves a position resolution (3σ) of 2 nm. The instrument performance is evaluated by 2D fly-scan ptychography with our developed data acquisition strategies. A spatial resolution of 8.8 nm has been demonstrated on a Au test sample with a detector continuous frame rate of 200 Hz. Using a higher flux X-ray source provided by double-multilayer monochromator, we achieve 10 nm resolution for an integrated circuit sample in an ultrafast scan with a detector’s full continuous frame rate of 3000 Hz (0.33 ms per exposure), resulting in an outstanding imaging rate of 9 × 104 resolution elements per second.
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Aug 01, 2019
- Source ID
- 10.1063/1.5103173
Entities
People
- Barry Lai
- Christian Roehrig
- Curt Preissner
- Dafei Jin
- David Vine
- Jeffrey A Klug
- Junjing Deng
- Ke Yue
- Maoyu Wang
- Max D. Wyman
- Michael Wojcik
- Sheikh Mashrafi
- Si Chen
- Stefan Vogt
- Tim Mooney
- Yi Jiang
- Yudong Yao
- Zhenxing Feng
- Zhonghou Cai
Organizations
- Argonne National Laboratory
- Intelligence Advanced Research Projects Activity
- Oregon State University
- United States Department of Energy