Novel spatially coordinated in-situ Raman and nanoscale wear analysis of FCVA-deposited DLC film
Abstract
A novel combined in-situ system, integrating Raman spectroscopy and depth-sensing techniques, was applied to analyze the wear induced transformation on the microstructure of diamond-like carbon (DLC) film deposited on Si substrates using a filtered cathodic arc vacuum (FCVA) deposition system. Using this synchronized characterization technique it was demonstrated that upon wear-induced removal of upper surface layers, the intensity ratio (ID/IG) for the area inside wear tracks decreases. On the other hand, while the peak position for the D line (PD) shifts to higher wavenumbers, the peak position for the G line (PG) shifts to lower wavenumbers. The coefficient of friction shows significant reduction upon increasing the depth of the wear tracks. These results confirm our previous preliminary report on the possible existence of layers rich in sp2 in the surface region. It was also shown that the wear debris is more graphitized.
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Jun 01, 2019
- Source ID
- 10.1063/1.5107474
Entities
People
- Franklin Chau-nan Hong
- Jonathan Hobley
- M. Djafari Rouhani
- Yeau-Ren Jeng
Organizations
- Air Force Office of Scientific Research
- National Cheng Kung University
- National Chung Cheng University
- National Science and Technology Council