Superconducting nanowire single-photon detectors fabricated from atomic-layer-deposited NbN
Abstract
High-quality ultrathin films of niobium nitride (NbN) are developed by the plasma-enhanced atomic layer deposition (PEALD) technique. Superconducting nanowire single-photon detectors patterned from this material exhibit high switching currents and saturated internal efficiencies over a broad bias range at a telecommunication wavelength of 1550 nm. Statistical analyses on hundreds of fabricated devices show a near-unity throughput yield due to the exceptional homogeneity of the films. The ALD-NbN material represents an ideal superconducting material for fabricating large single-photon detector arrays combining high efficiency, low jitter, and low dark counts.
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Dec 09, 2019
- Source ID
- 10.1063/1.5131664
Entities
People
- Hong X Tang
- Risheng Cheng
- Sihao Wang
Organizations
- Army Research Office
- Office of Emerging Frontiers and Multidisciplinary Activities
- Yale University