Three-dimensional visualization of Sb segregation in InAs/InAsSb superlattices using atom probe tomography
Abstract
The Sb concentration profile in an nBn photodetector containing an InAs/InAsSb type-II superlattice is collected and analyzed using atom probe tomography. A 3D reconstruction comprises the full composition of 31 periods. The Sb concentration profile is evaluated for the entire 31 period stack, as well as each individual period using segregation models from Muraki and Wood. Trends in the asymmetric Sb profile show a consistent non-negligible Sb concentration in the InAs layers and a lower Sb concentration in the InAsSb with respect to the target concentration.
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Jul 01, 2020
- Source ID
- 10.1063/1.5143446
Entities
People
- Amy W. K. Liu
- Dmitri Lubyshev
- Edward H. Aifer
- Jill A. Nolde
- Joel M. Fastenau
- Keith E Knipling
- M. E. Twigg
- Michael B. Katz
- Nicole A Kotulak
Organizations
- Office of Naval Research
- United States Naval Research Laboratory