Dielectric loss extraction for superconducting microwave resonators
Abstract
The investigation of two-level-state (TLS) loss in dielectric materials and interfaces remains at the forefront of materials research in superconducting quantum circuits. We demonstrate a method of TLS loss extraction of a thin film dielectric by using a lumped element resonator fabricated from a superconductor-dielectric-superconductor trilayer. We extract the dielectric loss by formulating a circuit model for a lumped element resonator with TLS loss and then fitting to this model using measurements from a set of three resonator designs: a coplanar waveguide resonator, a lumped element resonator with an interdigitated capacitor, and a lumped element resonator with a parallel plate capacitor that includes the dielectric thin film of interest. Unlike the commonly used single measurement technique, this method allows the accurate measurement of materials with TLS loss lower than 10−6. We demonstrate this method by extracting a TLS loss of 1.00×10−3 for sputtered Al2O3 using a set of samples fabricated from an Al/Al2O3/Al trilayer. We compare this method with the single measurement technique and observe a difference of 11% in extracted loss of the trilayer.
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- May 11, 2020
- Source ID
- 10.1063/5.0004622
Entities
People
- Battogtokh Jugdersuren
- C R H McRae
- D. P. Pappas
- J. L. Long
- Mustafa Bal
- Russell E Lake
- Thomas H Metcalf
- Xiao Liu
- Xinghua Wu
Organizations
- Army Research Office
- Jacobs Engineering Group
- Lawrence Livermore National Laboratory
- National Institute of Standards and Technology
- Office of Naval Research
- United States Naval Research Laboratory
- University of Colorado