Gated Hall and field-effect transport characterization of e-mode ZnO TFTs

Abstract

Two methods of measuring the electronic transport properties of a material are transistor DC-voltage and the Hall effect. Hall mobility measurements of normally off semiconductors can be done by electrostatic doping to lower resistance in the channel. We show that by measuring both, we can compare any value (raw measured as well as calculated data) directly to any other value along an index of FET gate and drain voltage across the entire safe operating area of the device. Our gated Hall technique intrinsic calculations of Hall mobility, typically possible only for bulk or doped materials, for thin-film transistor materials stack up with thickness scaled to practical values.

Document Details

Document Type
Pub Defense Publication
Publication Date
Jun 22, 2020
Source ID
10.1063/5.0009676

Entities

People

  • Jason Anders
  • Kevin Leedy
  • M. Kazimierczuk
  • M. Schuette
  • M. Streby
  • Nathan Miller
  • T. Cooper

Organizations

  • Air Force Office of Scientific Research
  • Air Force Research Laboratory
  • KBR, Inc.
  • Wright State University

Tags

Fields of Study

  • Materials science
  • Physics

Readers

  • Plasma Physics.
  • Semiconductor Device Technology

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene