Experimental demonstration of silicon photonic devices optimized by a flexible and deterministic pixel-by-pixel technique

Abstract

We present the experimental realization of photonic devices optimized by a pixel-by-pixel binary optimization method, which can straightforwardly take into account the technological constraints such as minimum feature sizes in the fabrication process. In this approach, for each iteration, one considers all the candidate structures that differ by a single pixel from the starting structure and update by adopting the structure that has the best figure of merit among all candidate structures. This approach can be implemented with high computational efficiency using a Green's function method. The devices optimized by this approach have been realized on 200 mm and 300 mm Silicon-On-Insulator platforms, using either e-beam lithography or deep-UV immersion lithography. Characterizations experimentally demonstrate the reliability of the method, given the technological constraints of Silicon Photonics.

Document Details

Document Type
Pub Defense Publication
Publication Date
Aug 17, 2020
Source ID
10.1063/5.0013558

Entities

People

  • C. Dupré
  • Karim Hassan
  • L. Baud
  • Salim Boutami
  • Shanhui Fan

Organizations

  • Air Force Office of Scientific Research
  • Grenoble Alpes University
  • Label Carnot
  • Stanford University

Tags

Fields of Study

  • Physics

Readers

  • Integrated Circuit Design and Technology.
  • Nanofabrication and Microfabrication.
  • Systems Analysis and Design

Technology Areas

  • Microelectronics