Genetically optimized dual-wavelength all-dielectric metasurface based on double-layer epsilon-near-zero indium-tin-oxide films

Abstract

Following the pioneering works on electrically tunable conducting oxide-based reflectarray metasurfaces, it has been shown that maximum phase modulation can be realized at a wavelength, where the transition from over- to under-coupling regimes coincides with the epsilon-near-zero (ENZ) phenomenon inside the indium-tin-oxide (ITO) active layer. However, the ENZ transition is restricted to a narrow bandwidth in the near-infrared regime, which limits the maximal achievable phase span at the wavelengths exterior to this bandwidth. Here, we present the realization of a dual wavelength all-dielectric metasurface with a large wavelength-contrast ratio between the operating channels, which is integrated by double-layer ITO films. The doping densities inside the ITO films are judiciously controlled to facilitate the ENZ-crossing of the relative permittivities at the corresponding working wavelengths. The all-dielectric metasurface is comprised of the arrays of cross-shaped holes made inside a high-index silicon slab supporting two resonances that are 300 nm apart. Numerical analysis of the near-field resonant modes reveals the excitation of guided-mode and magnetic dipole resonances, which strongly overlap with ITO active layers. Leveraging from the double-ENZ effect, considerable phase modulations of almost 220° and 240° are attained with a single metasurface platform at the wavelengths of λ1=1200 nm and λ2=1500 nm under the bias voltage application. The design parameters including the geometrical sizes and plasma frequencies of the differently doped ITO layers are carefully optimized by multi-objective genetic algorithm. The proposed metasurface illustrates a great promise in tunable beam splitting of the reflected light and dynamic conversion of the polarization states.

Document Details

Document Type
Pub Defense Publication
Publication Date
Dec 08, 2020
Source ID
10.1063/5.0026825

Entities

People

  • Ali Forouzmand
  • Hossein Mosallaei
  • Raana Sabri

Organizations

  • Air Force Office of Scientific Research
  • National Aeronautics and Space Administration
  • Northeastern University

Tags

Fields of Study

  • Physics

Readers

  • Nanofabrication and Microfabrication.
  • Optical Physics and Photonics.
  • Quantum Dot Semiconductor Device Photonics and Graphene Optoelectronic Materials and THz Physics.

Technology Areas

  • AI & ML
  • AI & ML - Machine Learning Algorithms
  • Biotechnology