Similarity law and frequency scaling in low-pressure capacitive radio frequency plasmas
Abstract
We verify the similarity law (SL) and show a violation of frequency scaling (f-scaling) in low-pressure capacitive radio frequency (rf) plasmas via fully kinetic particle-in-cell simulations. The SL scaling relations for electron density and electron power absorption are first confirmed in similar rf discharges. Based on these results, with only the driving frequency varied, the f-scaling for electron density is also validated, showing almost the same trend as the SL scaling, across most of the frequency regime. However, violations of the f-scaling are observed at lower frequencies, which are found to be relevant to the electron heating mode transition from stochastic to Ohmic heating. Electron kinetic invariance is illustrated for the SL and f-scaling being valid, respectively, whereas the electron kinetic variation is observed when the f-scaling is violated.
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Nov 16, 2020
- Source ID
- 10.1063/5.0029518
Entities
People
- Bocong Zheng
- De‐Qi Wen
- John Verboncoeur
- Peng Zhang
- Qi Hua Fan
- Yangyang Fu
Organizations
- Air Force Office of Scientific Research
- Michigan State University
- National Science Foundation
- United States Department of Energy