Thermal management strategies for gallium oxide vertical trench-fin MOSFETs

Abstract

Trench-fin MOSFETs, with their near-surface heat generation and the higher-surface area afforded by their geometry for thermal management, represent a promising solution to the thermal problems frequently encountered in lateral β-Ga2O3 devices. Here, we investigate potential thermal-management strategies for a vertical β-Ga2O3 trench-fin MOSFET through parametric analysis, offering recommendations on how best to design a device for maximal current density and excellent thermal performance. Primarily, by using a thermally conductive dielectric over the MOSFET structure, significant improvements to device power density may be achieved, aided by thermal spreading. Additionally, we find that by bonding thermal spreaders to its topside can yield significant improvements in thermal performance.

Document Details

Document Type
Pub Defense Publication
Publication Date
Feb 23, 2021
Source ID
10.1063/5.0033001

Entities

People

  • Akhil Mauze
  • Chao Yuan
  • James A. Speck
  • Jingjing Shi
  • Robert H. Montgomery
  • Samuel Graham
  • Samuel Kim
  • Satish Kumar
  • Takeki Itoh
  • Yuewei Zhang

Organizations

  • Air Force Office of Scientific Research
  • Georgia Tech
  • University of California, Santa Barbara

Tags

Readers

  • Integrated Circuit Design and Technology.
  • Systems Analysis and Design
  • Thermal Physics or Thermal Science.

Technology Areas

  • Microelectronics