Steady-state methods for measuring in-plane thermal conductivity of thin films for heat spreading applications

Abstract

The development of high thermal conductivity thin film materials for the thermal management of electronics requires accurate and precise methods for characterizing heat spreading capability, namely, in-plane thermal conductivity. However, due to the complex nature of thin film thermal property measurements, resolving the in-plane thermal conductivity of high thermal conductivity anisotropic thin films with high accuracy is particularly challenging. Capable transient techniques exist; however, they usually measure thermal diffusivity and require heat capacity and density to deduce thermal conductivity. Here, we present an explicit uncertainty analysis framework for accurately resolving in-plane thermal conductivity via two independent steady-state thermometry techniques: particle-assisted Raman thermometry and electrical resistance thermometry. Additionally, we establish error-based criteria to determine the limiting experimental conditions that permit the simplifying assumption of one-dimensional thermal conduction to further reduce thermal analysis. We demonstrate the accuracy and precision (<5% uncertainty) of both steady-state techniques through in-plane thermal conductivity measurements of anisotropic nanocrystalline diamond thin films.

Document Details

Document Type
Pub Defense Publication
Publication Date
Apr 01, 2021
Source ID
10.1063/5.0039966

Entities

People

  • Brian M. Foley
  • Karl D. Hobart
  • Luke Yates
  • Mark S. Goorsky
  • Marko J. Tadjer
  • Nicholas Hines
  • Samuel Graham
  • Tatyana I. Feygelson
  • Thomas L. Bougher
  • Zhe Cheng

Organizations

  • Defense Advanced Research Projects Agency
  • Georgia Tech
  • University of California

Tags

Readers

  • Combustion science or combustion engineering.
  • Materials Science and Engineering.
  • Systems Analysis and Design

Technology Areas

  • Microelectronics