OH-Si complex in hydrogenated n-typeβ-Ga2O3:Si
Abstract
Si is an n-type dopant in Ga2O3 that can be intentionally or unintentionally introduced. The results of Secondary Ion Mass Spectrometry, Hall effect, and infrared absorption experiments show that the hydrogen plasma exposure of Si-doped Ga2O3 leads to the formation of complexes containing Si and H and the passivation of n-type conductivity. The Si-H (D) complex gives rise to an O-H (D) vibrational line at 3477.6 (2577.8) cm−1 and is shown to contain a single H (or D) atom. The direction of the transition moment of this defect has been investigated to provide structure-sensitive information. Theory suggests possible structures for an OH-Si complex that is consistent with its observed vibrational properties.
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Aug 09, 2021
- Source ID
- 10.1063/5.0059769
Entities
People
- Amanda Portoff
- Andrew Venzie
- Chaker Fares
- Fan Ren
- Michael Stavola
- Stephen Pearton
- W. Beall Fowler
Organizations
- Defense Threat Reduction Agency
- Division of Materials Research
- Lehigh University
- University of Florida