Telecommunication-wavelength two-dimensional photonic crystal cavities in a thin single-crystal diamond membrane
Abstract
We demonstrate two-dimensional photonic crystal cavities operating at telecommunication wavelengths in a single-crystal diamond membrane. We use a high-optical-quality and thin (∼300 nm) diamond membrane, supported by a polycrystalline diamond frame, to realize fully suspended two-dimensional photonic crystal cavities with a high theoretical quality factor of ∼8 × 106 and a relatively small mode volume of ∼2(λ/n)3. The cavities are fabricated in the membrane using electron-beam lithography and vertical dry etching. We observe cavity resonances over a wide wavelength range spanning the telecommunication O- and S-bands (1360–1470 nm) with Q factors of up to ∼1800. Our method paves the way for on-chip diamond nanophotonic applications in the telecommunication-wavelength range.
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Oct 25, 2021
- Source ID
- 10.1063/5.0061778
Entities
People
- Afaq Habib Piracha
- Alastair Stacey
- Athavan Nadarajah
- Cleaven Chia
- Dylan Renaud
- Kazuhiro Kuruma
- Marko Lončar
- Neil Sinclair
- Steven Prawer
Organizations
- Air Force Office of Scientific Research
- Australian Research Council
- California Institute of Technology
- Harvard University
- National Science Foundation
- Natural Sciences and Engineering Research Council
- Office of Naval Research
- RMIT University
- United States Department of Energy
- University of Melbourne