Role of transferred graphene on atomic interaction of GaAs for remote epitaxy

Abstract

Remote epitaxy is a recently discovered type of epitaxy, wherein single-crystalline thin films can be grown on graphene-coated substrates following the crystallinity of the substrate via remote interaction through graphene. Although remote epitaxy provides a pathway to form freestanding membranes by controlled exfoliation of grown film at the graphene interface, implementing remote epitaxy is not straightforward because atomically precise control of interface is required. Here, we unveil the role of the graphene–substrate interface on the remote epitaxy of GaAs by investigating the interface at the atomic scale. By comparing remote epitaxy on wet-transferred and dry-transferred graphene, we show that interfacial oxide layer formed at the graphene–substrate interface hinders remote interaction through graphene when wet-transferred graphene is employed, which is confirmed by an increase of interatomic distance through graphene and also by the formation of polycrystalline films on graphene. On the other hand, when dry-transferred graphene is employed, the interface is free of native oxide, and single-crystalline remote epitaxial films are formed on graphene, with the interatomic distance between the epilayer and the substrate matching with the theoretically predicted value. The first atomic layer of the grown film on graphene is vertically aligned with the top layer of the substrate with these atoms having different polarities, substantiating the remote interaction of adatoms with the substrate through graphene. These results directly show the impact of interface properties formed by different graphene transfer methods on remote epitaxy.

Document Details

Document Type
Pub Defense Publication
Publication Date
Nov 01, 2021
Source ID
10.1063/5.0064232

Entities

People

  • Doyoon Lee
  • Hu Young Jeong
  • Hyunseok Kim
  • Jeehwan Kim
  • Jimyeong Yu
  • Kuangye Lu
  • Naeun Kim
  • Sungkyu Kim
  • Yoongu Jeong

Organizations

  • Air Force Research Laboratory
  • Defense Advanced Research Projects Agency
  • Massachusetts Institute of Technology
  • National Research Foundation of Korea
  • Sejong University
  • Ulsan National Institute of Science and Technology
  • United States Department of Energy

Tags

Fields of Study

  • Physics

Readers

  • Quantum Dot Semiconductor Device Photonics and Graphene Optoelectronic Materials and THz Physics.
  • Semiconductor Device Technology
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene