Achieving high spatial resolution in a large field-of-view using lensless x-ray imaging
Abstract
X-ray ptychography, a powerful scanning lensless imaging technique, has become attractive for nondestructively imaging internal structures at nanoscale. Stage positioning overhead in conventional step-scan ptychography is one of the limiting factors on the imaging throughput. In this work, we demonstrate the use of advanced fly scan ptychography to achieve high-resolution ptychograms of modern integrated circuits on a large field-of-view at millimeter scale. By completely removing stage overheads between scan points, the imaging time for millimeter-size sample can be significantly reduced. Furthermore, we implement the orthogonal probe relaxation technique to overcome the variation of illumination across the large scan area as well as local vibrations. The capability of x-ray ptychography shown here is broadly applicable for various studies, which requires both high spatial resolution and large scan area.
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Sep 20, 2021
- Source ID
- 10.1063/5.0067197
Entities
People
- Barry Lai
- Christian Roehrig
- Curt Preissner
- Fabricio S. Marin
- Jeffrey A Klug
- Junjing Deng
- Sheikh Mashrafi
- Stefan Vogt
- Yi Jiang
- Yudong Yao
- Zhonghou Cai
Organizations
- Argonne National Laboratory
- Intelligence Advanced Research Projects Activity
- United States Department of Energy