Nitrogen plasma passivated niobium resonators for superconducting quantum circuits

Abstract

Microwave loss in niobium metallic structures used for superconducting quantum circuits is limited by a native surface oxide layer formed over a timescale of minutes when exposed to an ambient environment. In this work, we show that nitrogen plasma treatment forms a niobium nitride layer at the metal–air interface, which prevents such oxidation. X-ray photoelectron spectroscopy confirms the doping of nitrogen more than 5 nm into the surface and a suppressed oxygen presence. This passivation remains stable after aging for 15 days in an ambient environment. Cryogenic microwave characterization shows an average filling-factor-adjusted two-level-system loss tangent FδTLS of (2.9±0.5)·10−7 for resonators with a 3 μm center strip and (1.0±0.3)·10−7 for a 20 μm center strip, exceeding the performance of unpassivated samples by a factor of four.

Document Details

Document Type
Pub Defense Publication
Publication Date
Mar 07, 2022
Source ID
10.1063/5.0082755

Entities

People

  • Daria Kowsari
  • David Wisbey
  • Erik A Henriksen
  • Kaiwen Zheng
  • Kater Murch
  • N. J. Thobaben
  • Sheng Ran
  • Xingrui Song
  • Xinyi Du

Organizations

  • Air Force Office of Scientific Research
  • John Templeton Foundation
  • National Science Foundation
  • Saint Louis University
  • United States Department of Energy
  • Washington University in St. Louis

Tags

Fields of Study

  • Physics

Readers

  • Quantum Dot Semiconductor Device Photonics and Graphene Optoelectronic Materials and THz Physics.
  • Superconducting Magnet Technology
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene
  • Quantum Computing
  • Quantum Science - Quantum Dots