Piezo-optomechanical cantilever modulators for VLSI visible photonics
Abstract
Visible-wavelength very large-scale integration photonic circuits have a potential to play important roles in quantum information and sensing technologies. The realization of scalable, high-speed, and low-loss photonic mesh circuits depends on reliable and well-engineered visible photonic components. Here, we report a low-voltage optical phase shifter based on piezo-actuated mechanical cantilevers, fabricated on a CMOS compatible, 200 mm wafer-based visible photonics platform. We show linear phase and amplitude modulation with 6 Vπ cm in differential operation, −1.5 to −2 dB insertion loss, and up to 40 dB contrast in the 700–780 nm range. By adjusting selected cantilever parameters, we demonstrate a low-displacement and a high-displacement device, both exhibiting a nearly flat frequency response from DC to a peak mechanical resonance at 23 and 6.8 MHz respectively, which, through resonant enhancement of Q ∼ 40, further decreases the operating voltage down to 0.15 Vπ cm.
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- May 01, 2022
- Source ID
- 10.1063/5.0088424
Entities
People
- Alex Witte
- Andrew J. Leenheer
- Daniel Domínguez
- David Heim
- Dirk Englund
- Genevieve Clark
- Gerald Gilbert
- Mark Dong
- Matt Eichenfield
- Matthew Zimmermann
- Y. Henry Wen
Organizations
- Brookhaven National Laboratory
- Center for Integrated Nanotechnologies
- Defense Advanced Research Projects Agency
- MITRE Corporation
- Massachusetts Institute of Technology
- National Science Foundation
- Sandia National Laboratories