III-nitride vertical hot electron transistor with polarization doping and collimated injection

Abstract

III-nitride-based hot electron transistors (HETs) offer a significant promise as high-speed, high-power devices, but their performance has been limited to below that of competing technologies. Here, we report on a HET with current density > 440 kA/cm2 and common-emitter current gain >20. Polarization engineering of the emitter stack was used to allow for high-current collimated electron injection from the emitter with relatively low turn-on voltage. The use of only polarization charge in the undoped 10 nm-thick base allowed for high gain through minimization of scattering with atomic layer etching contact fabrication used to lower base access resistance.

Document Details

Document Type
Pub Defense Publication
Publication Date
Nov 28, 2022
Source ID
10.1063/5.0129920

Entities

People

  • A. Zaslavsky
  • J. A. Brinkerhoff
  • Jeffrey W Daulton
  • M.A. Hollis
  • R. J. Molnar

Organizations

  • Brown University
  • Massachusetts Institute of Technology
  • Office Of The Under Secretary Of Defense

Tags

Fields of Study

  • Materials science
  • Physics

Readers

  • Aerospace Propulsion Engineering.
  • Pulsed Power and Plasma Physics.
  • Semiconductor Device Technology

Technology Areas

  • Microelectronics