High Ion/Ioff ratio 4H-SiC MISFETs with stable operation at 500 °C using SiO2/SiNx/Al2O3 gate stacks
Abstract
In this work, 4H-SiC lateral metal-insulator-semiconductor field-effect transistors (MISFETs) were demonstrated to operate up to 500 °C with a high on/off current ratio (over 109). A low off-state current of 3.6 × 10−9 mA/mm at 500 °C was obtained in SiC MISFET with a ring structure. The MISFETs with SiO2/SiNx/Al2O3 gate dielectric stack showed minimum subthreshold swings of 155 and 240 mV/dec at room temperature and 500 °C, respectively, indicating good thermal stability of this gate dielectric stack on SiC. An interface trap density of 1.3 × 1011 cm−2 eV−1 at E − EV = 0.2 eV was extracted from the Capacitance–Voltage (CV) measurements at room temperature, which confirms excellent dielectric interface. The electron mobility increases with increasing temperature and reaches 39.4 cm2/V s at 500 °C. These results indicate that SiC MISFETs with triple layer dielectrics and ring structure have a high potential in extreme-temperature electronics.
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Feb 20, 2023
- Source ID
- 10.1063/5.0134729
Entities
People
- Hanwool Lee
- Junzhe Kang
- Kai Xu
- R. Mohan Sankaran
- Souvik Bhattacharya
- Wenjuan Zhu
- Zhiyu Wang
- Zijing Zhao
Organizations
- Defense Advanced Research Projects Agency
- University of Illinois Urbana–Champaign