Angular magnetic field dependence of a doubly clamped magnetoelectric resonator
Abstract
Angular dependence of magnetic field response of fully suspended resonant microelectromechanical double-clamped magnetoelectric beams was investigated as the basis for a vector magnetometer utilizing the magnetically induced change in fundamental resonance frequency. Strain-coupled magnetostrictive iron cobalt (FeCo) and piezoelectric aluminum nitride layers together constitute a magnetoelectric heterostructure with a high magnetic field sensitivity of 70 Hz/mT along the beam axis and a transfer function of 47 V/T at 10 Hz. The fundamental frequency shift to an external magnetic field is found to be strongly anisotropic with a relative variation of more than 3% between perpendicular and parallel field orientations with respect to the long axis of the beam at a field of 100 mT. This design can form the basis for an on-chip high sensitivity vector magnetometer operating with ultra-low power when multiplexed with two or more resonators.
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Aug 07, 2023
- Source ID
- 10.1063/5.0155052
Entities
People
- Benjamin M. Lefler
- Jeffrey Baldwin
- K. Bussmann
- Margo Staruch
- Nicholas T. Gangemi
- Norman Gottron
- Peter Finkel
- Samuel E. Lofland
- Steven P. Bennett
- Thomas Mion
Organizations
- American Society for Engineering Education
- Carnegie Mellon University
- Drexel University
- Office of Naval Research
- Rowan University
- United States Naval Research Laboratory