Ultrathin, transferred layers of thermally grown silicon dioxide as biofluid barriers for biointegrated flexible electronic systems

Abstract

A critical obstacle of flexible electronics for chronic implants is the absence of thin-film barriers to biofluids with multidecade lifetimes. Previously explored materials are unsuitable due to limitations of ( i ) extrinsic factors, such as the practical inability to avoid localized defects, and/or ( ii ) intrinsic properties, such as finite water permeability. The work presented here overcomes these challenges by combining pristine thermal SiO 2 layers with processing steps for their integration onto flexible electronics. Experimental and theoretical studies reveal the key aspects of this material system. Accelerated immersion tests and cyclic bending measurements suggest robust, defect-free operation with various electronic components and an integrated system for multiplexed mapping of electrophysiological signals. The findings have broad relevance to diverse biointegrated electronics and optoelectronics.

Document Details

Document Type
Pub Defense Publication
Publication Date
Oct 17, 2016
Source ID
10.1073/pnas.1605269113

Entities

People

  • Amir Barati Farimani
  • Chia-Han Chiang
  • Dong Xu
  • Enming Song
  • Guanhua Fang
  • Hui Fang
  • Jianing Zhao
  • John A. Rogers
  • Jonathan Viventi
  • Ki Jun Yu
  • Kyung Jin Seo
  • Muhammad Ashraful Alam
  • N. R. Aluru
  • Sang Min Won
  • Santanu Chaudhuri
  • Seo Woo Choi
  • Wenbo Du
  • Xin Jin
  • Yeguang Xue
  • Yiding Zhong
  • Yonggang Huang
  • Zijian Yang

Organizations

  • Army Research Office
  • Duke University
  • Fudan University
  • National Science Foundation
  • Northwestern University
  • Purdue University
  • University of Illinois Urbana–Champaign

Tags

Fields of Study

  • Engineering

Readers

  • Distributed Systems and Data Platform Development
  • Quantum Dot Semiconductor Device Photonics and Graphene Optoelectronic Materials and THz Physics.
  • Semiconductor Device Technology

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene