Conductively coupled flexible silicon electronic systems for chronic neural electrophysiology

Abstract

A critical challenge for flexible biomedical implants is in the development of materials and structures that enable intimate coupling to biotissues with long-term stability. The results presented here address this problem through a materials and integration strategy that combines highly doped silicon nanomembranes chemically bonded to thin films of thermal silicon dioxide in a construct that simultaneously serves as a biofluid barrier and a conductively coupled biointerface. Use of this approach with various flexible electronic systems, including passive and active electrodes for electrophysiological sensing and electrical stimulation, illustrate capabilities in high-fidelity operation. Systematic accelerated lifetime studies in artificial biofluids highlight the stability of these systems for chronic operation, without electrical leakage or other forms of degradation.

Document Details

Document Type
Pub Defense Publication
Publication Date
Sep 18, 2018
Source ID
10.1073/pnas.1813187115

Entities

People

  • Charles Wang
  • Chia-Han Chiang
  • Enming Song
  • Guanhua Fang
  • Haina Du
  • Jahyun Koo
  • Jinghua Li
  • Jize Zhang
  • John A. Rogers
  • Jonathan Viventi
  • Ki Jun Yu
  • Limei Tian
  • Mackenna Hill
  • Yiding Zhong
  • Yishan Zhong
  • Yisong Chen

Organizations

  • Duke University
  • National Research Foundation of Korea
  • Northwestern University
  • University of Illinois Urbana–Champaign
  • Yonsei University

Tags

Readers

  • Auditory Neuroscience/Auditory Physiology.
  • Nanocomposite Materials Science
  • Thin Film Deposition Science.

Technology Areas

  • Biotechnology
  • Microelectronics