Expeditious, scalable solution growth of metal oxide films by combustion blade coating for flexible electronics
Abstract
Solution-processing metal oxide (MO) films at low temperature enables their integration in mechanically flexible and inexpensive substrates for unconventional optoelectronics. However, temperature reduction has not been accompanied by a corresponding reduction in film-processing time, which remains far greater than acceptable for efficient/continuous additive manufacturing as in typical fabrication lines. Here, we report a highly efficient cofuel-assisted combustion process, which involves introducing both a fluorinated fuel and a preannealing step, that achieves ultrafast reaction and metal–oxygen–metal (M-O-M) lattice condensation within 10–60 s for several MO semiconductors and aluminum oxide dielectric. The resulting MO transistors exhibit high carrier mobility, excellent bias stability, and good flexibility.
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Apr 19, 2019
- Source ID
- 10.1073/pnas.1901492116
Entities
People
- Antonio Facchetti
- Aritra Sil
- Binghao Wang
- Gang Wang
- Li Zeng
- Matthew J. Leonardi
- Michael Bedzyk
- Peijun Guo
- Richard D. Schaller
- Shaofeng Lu
- Tobin J. Marks
- Wei Huang
- Xinan Zhang
- Yu Xia
- Zhihua Chen
Organizations
- Air Force Office of Scientific Research
- Argonne National Laboratory
- Henan University
- National Science Foundation
- Northwestern University
- United States – Israel Binational Science Foundation