High-performance and low-power source-gated transistors enabled by a solution-processed metal oxide homojunction

Abstract

Cost-effective fabrication of mechanically flexible low-power electronics is important for emerging applications including wearable electronics, artificial intelligence, and the Internet of Things. Here, solution-processed source-gated transistors (SGTs) with an unprecedented intrinsic gain of ~2,000, low saturation voltage of +0.8 ± 0.1 V, and a ~25.6 μW power consumption are realized using an indium oxide In 2 O 3 /In 2 O 3 :polyethylenimine (PEI) blend homojunction with Au contacts on Si/SiO 2 . Kelvin probe force microscopy confirms source-controlled operation of the SGT and reveals that PEI doping leads to more effective depletion of the reverse-biased Schottky contact source region. Furthermore, using a fluoride-doped AlO x gate dielectric, rigid (on a Si substrate) and flexible (on a polyimide substrate) SGTs were fabricated. These devices exhibit a low driving voltage of +2 V and power consumption of ~11.5 μW, yielding inverters with an outstanding voltage gain of >5,000. Furthermore, electrooculographic (EOG) signal monitoring can now be demonstrated using an SGT inverter, where a ~1.0 mV EOG signal is amplified to over 300 mV, indicating significant potential for applications in wearable medical sensing and human–computer interfacing.

Document Details

Document Type
Pub Defense Publication
Publication Date
Jan 11, 2023
Source ID
10.1073/pnas.2216672120

Entities

People

  • Antonio Facchetti
  • Fengjing Liu
  • Gang Wang
  • Jianhua Chen
  • Joon-Seok Kim
  • Junsheng Yu
  • Lincoln J Lauhon
  • Tobin J. Marks
  • Wei Huang
  • Xinming Zhuang
  • Yao Chen
  • Yao Yao
  • Yuhua Cheng
  • Zai-Xing Yang
  • Zhi Wang

Organizations

  • Air Force Research Laboratory Information Directorate
  • China Postdoctoral Science Foundation
  • National Natural Science Foundation of China
  • National Science Foundation
  • Natural Science Foundation of Shandong Province
  • Northwestern University
  • Shandong University
  • University of Electronic Science and Technology of China

Tags

Fields of Study

  • Materials science

Readers

  • Computer Engineering
  • Nanocomposite Materials Science
  • Semiconductor Device Technology

Technology Areas

  • 5G
  • 5G - Internet of Things
  • AI & ML
  • AI & ML - Bayesian Inference
  • Microelectronics