Scalable control of graphene growth on 4H-SiC C-face using decomposing silicon nitride masks

Document Details

Document Type
Pub Defense Publication
Publication Date
Mar 25, 2015
Source ID
10.1088/0022-3727/48/15/152001

Entities

People

  • Abdallah Ougazzaden
  • Claire Berger
  • ClĂ©ment Bouvier
  • James Palmer
  • John Hankinson
  • Paul L. Voss
  • Renaud Puybaret
  • Walt A. De Heer

Organizations

  • Air Force Office of Scientific Research
  • National Science Foundation
  • W. M. Keck Foundation

Tags

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene