Chlorine-based dry etching ofβ-Ga2O3

Document Details

Document Type
Pub Defense Publication
Publication Date
Apr 14, 2016
Source ID
10.1088/0268-1242/31/6/065006

Entities

People

  • Elaheh Ahmadi
  • Jack E Hogan
  • James S. Speck
  • Stephen W. Kaun
  • Yuichi Oshima

Organizations

  • Air Force Office of Scientific Research
  • Center for Hierarchical Manufacturing