Patterning of light-extraction nanostructures on sapphire substrates using nanoimprint and ICP etching with different masking materials
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Feb 03, 2015
- Source ID
- 10.1088/0957-4484/26/8/085302
Entities
People
- Hao Chen
- Qi Zhang
- Stephen Y. Chou
Organizations
- Defense Advanced Research Projects Agency