Gas-assisted electron-beam-induced nanopatterning of high-quality titanium oxide
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Feb 15, 2016
- Source ID
- 10.1088/0957-4484/27/11/115304
Entities
People
- A I Aristov
- A V Kabashin
- A V Riazanova
- B N Costanzi
- E. Dan Dahlberg
- J J L Mulders
- L M Belova
- Y G M Rikers
Organizations
- Agence Nationale de la Recherche
- Carl Trygger Foundation
- Division of Materials Research
- European Cooperation in Science and Technology
- French National Institute of Health and Medical Research
- Office of Naval Research Global
- Swedish Research Council