Nanofabrication of arrays of silicon field emitters with vertical silicon nanowire current limiters and self-aligned gates
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Jun 13, 2016
- Source ID
- 10.1088/0957-4484/27/29/295302
Entities
People
- Akintunde I. Akinwande
- Stephen A. Guerrera
Organizations
- Defense Advanced Research Projects Agency