Nanofabrication of arrays of silicon field emitters with vertical silicon nanowire current limiters and self-aligned gates

Document Details

Document Type
Pub Defense Publication
Publication Date
Jun 13, 2016
Source ID
10.1088/0957-4484/27/29/295302

Entities

People

  • Akintunde I. Akinwande
  • Stephen A. Guerrera

Organizations

  • Defense Advanced Research Projects Agency