Fabrication of sub-10 nm metal nanowire arrays with sub-1 nm critical dimension control

Document Details

Document Type
Pub Defense Publication
Publication Date
Oct 17, 2016
Source ID
10.1088/0957-4484/27/46/464004

Entities

People

  • Peng Lin
  • Qiangfei Xia
  • Shuang Pi

Organizations

  • Air Force Office of Scientific Research
  • National Science Foundation