Arrayed architectures for multi-stage Si-micromachined high-flow Knudsen pumps

Document Details

Document Type
Pub Defense Publication
Publication Date
Oct 15, 2015
Source ID
10.1088/0960-1317/25/11/115026

Entities

People

  • Seungdo An
  • Yogesh B. Gianchandani
  • Yutao Qin

Organizations

  • Defense Threat Reduction Agency