Probing contact-mode characteristics of silicon nanowire electromechanical systems with embedded piezoresistive transducers

Document Details

Document Type
Pub Defense Publication
Publication Date
Aug 19, 2015
Source ID
10.1088/0960-1317/25/9/095014

Entities

People

  • Carine Marcoux
  • Laurent Duraffourg
  • Mary Anne Tupta
  • Philip X-L Feng
  • Philippe Andreucci
  • Rui Yang
  • Tina He

Organizations

  • China Scholarship Council
  • Defense Advanced Research Projects Agency
  • Defense Threat Reduction Agency
  • National Science Foundation

Tags

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems