Characterization of the mechanical behavior of SU-8 at microscale by viscoelastic analysis

Document Details

Document Type
Pub Defense Publication
Publication Date
Aug 23, 2016
Source ID
10.1088/0960-1317/26/10/105001

Entities

People

  • Hongbing Lu
  • Jeong-bong Lee
  • Jun Hyeon Yoo
  • Sachin Babu
  • Samit Roy
  • Tingge Xu

Organizations

  • Air Force Office of Scientific Research
  • Division of Electrical, Communications & Cyber Systems