An electrostatic ion pump with nanostructured Si field emission electron source and Ti particle collectors for supporting an ultra-high vacuum in miniaturized atom interferometry systems

Document Details

Document Type
Pub Defense Publication
Publication Date
Sep 29, 2016
Source ID
10.1088/0960-1317/26/12/124003

Entities

People

  • Anirban Basu
  • Luis F. Velásquez-garcía

Organizations

  • Defense Advanced Research Projects Agency

Tags

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene