Axial asymmetry for improved sensitivity in MEMS piezoresistors

Document Details

Document Type
Pub Defense Publication
Publication Date
Jul 20, 2016
Source ID
10.1088/0960-1317/26/9/095014

Entities

People

  • Bruce Alphenaar
  • J. L. Davidson
  • Ji-Tzuoh Lin
  • Kevin Walsh
  • Pranoy Deb Shuvra
  • Shamus McNamara

Organizations

  • Defense Threat Reduction Agency