Correlating metastable-atom density, reduced electric field, and electron energy distribution in the post-transient stage of a 1-Torr argon discharge

Document Details

Document Type
Pub Defense Publication
Publication Date
Jun 05, 2015
Source ID
10.1088/0963-0252/24/3/034009

Entities

People

  • E V Barnat
  • J B Franek
  • M. E. Koepke
  • S H Nogami
  • V. I. Demidov

Organizations

  • Air Force Research Laboratory
  • Office of Fusion Energy Sciences

Tags

Technology Areas

  • Microelectronics