Thickness mode EMIS of constrained proof-mass piezoelectric wafer active sensors

Document Details

Document Type
Pub Defense Publication
Publication Date
Oct 22, 2015
Source ID
10.1088/0964-1726/24/11/115035

Entities

People

  • Bin Lin
  • Tuncay Kamas
  • Victor Giurgiutiu

Organizations

  • National Science Foundation Directorate for Engineering
  • Office of Naval Research