Lithographically defined aluminum nitride cross-sectional Lamé mode resonators

Document Details

Document Type
Pub Defense Publication
Publication Date
Feb 15, 2017
Source ID
10.1088/1361-6439/aa5a83

Entities

People

  • Cristian Cassella
  • G E Hummel
  • Genyu Chen
  • M. Rinaldi
  • Z. Qian

Organizations

  • Defense Advanced Research Projects Agency